从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能∗

摘要

AZ系镁合金在工业领域具有广阔的应用前景，但其耐腐蚀性能和耐磨损性能差阻碍了其发展。绿色环保的磁控溅射表面涂覆技术是防止镁合金腐蚀和磨损的方法之一。简要地介绍了磁控溅射镀膜技术的原理及特点，评述了当今磁控溅射的重要发展。结合近几年的实验研究，回顾和总结了溅射沉积薄膜技术的发展历程和应用现状，重点分析了溅射工艺参数对薄膜耐腐蚀和耐磨损性能的影响。最后，展望了磁控溅射技术未来的发展趋势。%AZ magnesium alloys has been widely used in industry field.However,the poor corrosion and wear resistance of magnesium and its alloys has been mainly limited their development.Magnetron sputtering is one of the important methods to protect on corrosion and wear of AZ magnesium alloys.The principle and development of magnetron sputtering technologies were introduced in this paper.Based on the experiments in recent years,development and application status of magnetron sputtering technology were reviewed and summarized.And the influence of the sputtering parameters on corrosion and wear resistance of the films was discussed in particular.In the end,the developmental trend of magnetron sputtering was introduced.