以直线超声电机运动平台为研究对象,采用系统辨识的方法,建立了以电压控制信号为输入、平台位移为输出的系统辨识模型,得到了其传递函数,并对模型参数进行了拟合。模型仿真结果和实际运行结果表明,数学模型能较好地描述实际系统行为。此研究对实现超声电机精密运动的控制提供了理论依据。%Considering linear ultrasonic motor precision motion platform as the research object and using system identification method ,this paper builds a platform’s voltage displacement identifi-cation model and gets its transfer function ,then the model parameters are fitted .Contrasting the model simulation results and the actual operating results , it show s that the mathematical model can describe the actual system behavior well .It provides basis for the realization of this paper’s linear ultrasonic motor’s precision motion control .
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