基于人机工程学的光刻机嵌入式控制面板界面设计

摘要

基于人机工程学的研究方法，以光刻机嵌入式控制面板的人机信息交互作为设计切入点，结合工程实践分析了控制面板显示器和控制器在使用时的特点，探讨了光刻机控制面板在界面设计中应遵循的原则。在此基础上，设计了一套可行的光刻机嵌入式控制面板。%Based on the research methods of ergonomics , it introduces the interface design of the lithography ma-chine's embedded control panel , and describes the human -machine interactive information of the lithography machine.It analyzes the features of the control panel's displayer and controller , shows the design philosophy such as applying the lithography machine control panel to the man -machine interface design .Finally it illustrates a set of feasible lithography machine control panel based on the embedded system .