不同离子液体润滑条件下BCN薄膜摩擦学性能研究

摘要

利用中频磁控溅射技术,分别溅射硼靶和石墨靶,在单晶硅衬底上制备BCN薄膜;采用原子力显微镜(AFM)对薄膜的表面形貌进行分析;在1-正丁基-3-甲基咪唑四氟硼酸盐(L104)和1-正己基-3-乙基咪唑六氟磷酸盐(L-P206)离子液体润滑条件下,利用CSM摩擦磨损试验机考察BCN薄膜/钢球摩擦副的摩擦磨损性能;利用电化学腐蚀方法考察薄膜在离子液中的耐腐蚀性能.实验结果表明:所制备的BCN薄膜均匀、致密,表面粗糙度小;在离子液体润滑剂润滑下,BCN薄膜表现出良好的抗磨减摩性能和抗腐蚀性能;与L-P206离子液润滑剂相比,BCN薄膜在L104离子液体润滑剂润滑下的摩擦学性能更好,这可能与L104离子液体自身的分子结构及其腐蚀性弱有关.%Boron carbon nitride(BCN) films were deposited on silicon substrate by medium frequency magnetron sputtering technology.Graphite and boron were used for sputtering targets.Atomic force microscopy(AFM) was performed to determine the surface morphology of the films.The tribological performances of the boron carbon nitride film with 1-butyl,3-methylimidazolium tetrafluoroborate(L-104) and 3-hexy, 1-ethylimidazolium hexafluorophosphate(L-P206) ionic liquids as lubricants and the electrochemical corrosive behaviors of the BCN film were investigated.The results show that the prepared BCN film is smooth and compact,and the BCN film demonstrates excellent tribological properties and corrosion resistance under two different ionic liquids lubrication.Compared with L-P206, BCN film has a low friction coefficient, low wear rates and good corrosion resistance with L-104 ionic liquid as lubricant.This may be attributed to the molecule structure of L-lO4 ionic liquid under boundary lubrication and its weak corrosive properties.