类金刚石碳基薄膜在1-乙基-3-甲基咪唑四氟硼酸盐中的摩擦学性能

摘要

利用射频等离子体增强化学气相沉积技术，以甲烷为气源，在单晶硅（P （001））衬底上制备类金刚石碳基薄膜（DLC）；利用高速往复摩擦磨损试验机分别测试DLC薄膜／Al2 O3球摩擦副在大气环境下和1-乙基-3-甲基咪唑四氟硼酸盐离子液润滑下的摩擦磨损性能；利用光学显微镜，X射线光电子能谱和三维轮廓仪分别对磨痕、磨痕表面元素和磨损率进行考察。实验结果表明：DLC薄膜在离子液润滑时，在低载荷下减摩作用明显，但在较高载荷下摩擦因数较无离子液润滑时高，且不随载荷增加而变化，推测是离子液形成了边界润滑膜；XPS分析表明这层边界润滑膜可能是由离子液物理吸附在摩擦接触面上形成的，并且对DLC薄膜有很强的抗磨作用。%Diamond-like Carbon (DLC)films were deposited on silicon substrate by radio frequency plasma enhanced chemical vapor depositing technology with methane as source gas. The tribological performances of the DLC films against with Al2 O3 ball under air and 1-ethyl-3-methylimidazolium tetrafluoroborate ([emim]BF4 )ionic liquid lubrication were tested by reciprocating ball-on-disc tester. The wear tracks,bonding structure of wear tracks and wear rates were investiga-ted by measuring microscope,X-ray photoelectron spectroscopy (XPS)and 3D surface profiler,respectively. The results show that the DLC film has a lower friction coefficient with ionic liquid under low load,and the friction coefficient is stable with the load increasing. This may be attributed to the boundary lubricant films physical absorbed between contact inter-faces,and the boundary-film formed by ionic liquid reduce the wear of DLC films obviously.