多束表面等离子体干涉场的模拟研究

摘要

In order to find out the interference field of multi-beam surface plasma polaritons ( SPPs), the theoretical interference model of multi-beam SPPs was deduced according to strict analytical expressions. The 2-D and 3-D lattice structure characteristics of SPPs interference were simulated and the resolution reached 1/6 wavelength. Its profile was the same as that of the ordinary laser beam interference field. It' s very important for the multi-beam SPP lithography and manufacture of nano-scale optical devices.%为了找出多束表面等离子体激元干涉的分布情况,采用严格的解析推导方式,建立了多束表面等离子体激元干涉场的理论模型,在此基础上数值模拟了多束表面等离子体激元干涉产生的2维及3维点阵结构的特性.结果表明,干涉场分辨率可达到1/6波长,并与普通激光多光束干涉场在光场的形状上一致.该研究有助于多束表面离子体激元光刻的进一步研究和阵列型纳米级光学器件的制造.