类金刚石膜具有硬度高、摩擦系数低、耐腐性强、稳定性高等优良性质,是提高镁合金耐腐性的理想材料.但镁合金与类金刚石膜之间结合力差,本研究通过制备Si/SixNy过渡层成功解决了镁合金与类金刚石膜之间结合力差的问题.将磁控溅射物理气相沉积与化学气相沉积技术相结合,通过改变膜沉积偏压在镁合金表面沉积类金刚石膜.拉曼光谱测试表明,所制备的碳膜具有典型的类金刚石结构.划痕法测试表明,膜与基体之间的结合力非常大.最后通过失重实验分析了类金刚石膜对镁合金耐腐蚀性的影响.%Diamond-like carbon (DLC)films have good properties,such as high hardness,low friction coefficient,high stability,etc.DLC films makeit the ideal material for the improvement of magnesium corrosion resistance.However,the coherence between DLC film and magnesium surface is bad.Thus,in this paper,Si/SixNy intermediate layer is designed to resolve this problem.DLC films have successfully grown on magnesium surface by changing deposition bias voltage,combining magneto-sputtering physical vapor deposition with chemical vapor deposition.Raman spectroscopy results indicated that the films showed an amorphous structure and typical characteristics of DLC film.The coherence between magnesium surface and DLC films was analyzed by indentation method,which indicated the tight coherence.Finally,the influence of DLC films on corrosion resistance for magnesium alloy was analyzed via weight-loss test.
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