强流真空二极管材料放气特性研究

摘要

高功率微波技术的实用化进程要求强流真空二极管缩短抽气准备时间并保持较高的真空度水平.材料出气是高真空状态下二极管腔体内的主要气源,直接制约着抽气和保真空时间.针对一种陶瓷真空界面、黄铜和硬铝为阴极和阳极外壳的氟橡胶压封二极管,利用真空设计软件VacTran建立了抽气模型,模拟了管道流导对有效抽速的影响以及真空室主要材料出气率和抽气曲线;实际比较了常温和烘烤状态下二极管材料的出气特性:以60h作为总的出气时间,200℃烘烤8h的出气量超过了总出气量的65%;真空室气压在没有吸气泵作用下维持10-2Pa水平的时间相比未烘烤时提高了约1.5倍.烘烤对缩短加速器真空系统准备时间、提高器件真空度水平具有明显效果.%Vacuum diodes are among the most important parts of high electron beam accelerators. In order to make vacuum sealing good, outgassing properties of materials for a ceramic insulated diode is investigated. A pumping model including the influence of flow conductance was set up to simulate the material outgassing rate and pump down time. Finally, the outgassing characteristics of materials between normal temperature and heated state are compared in experiment. Results show that heating can efficiently accelerate the outgassing rate and raise the vacuum sealing time.