基于ANSYS Workbench的固晶臂机构柔性动力学分析

摘要

针对固晶机设备对固晶机构的高速、高稳定性要求,基于采用曲柄摇杆结构的固晶机构的三维实体模型,以ANSYSWorkbench有限元分析软件为基础,利用ANSYS Workbench-ADAMS联合仿真及ANSYS Workbench的静力、动力学仿真模块这两种柔性动力学分析方法,对固晶臂机构末端工作位置的运动、动力学特性进行了仿真分析.研究结果表明,ANSYS Workbench模块仿真方法与Workbench-ADAMS联合仿真相比,仿真结果具有一致性,但其仿真过程相对简单,便于操作；其仿真结果可为固晶机构后续的设计优化提供依据.%Aiming at the rapid, high stability requirements of die—bounder, based on the 3-dimensional solid model of die—bounder structure with crank-rocker structure and ANSYS Workbench finite element analysis software, two flexible dynamic analysis methods, co-simulation of ANSYS Workbench-ADAMS and co-simulation of ANSYS Workbench modules, were used to study the statics and dynamics characters of the end work position of die-bounder arm. The result shows that the ANSYS Workbench method can obtain the same result compared to the ANSYS Workbench-ADAMS combination simulation method, but it has a much simpler process, and the subsequent optimization design scheme can be obtained based on these results.