TiN薄膜的多元合金化强化

摘要

Multi-component elements alloying is one of the methods for improving the properties of TiN film,which has been researched widespreadly. Deposition processes and properties of various multi-components films are reviewed in this paper. The relation between properties and deposition parameters is also discussed.%多元合金化是强化TiN膜的有效途径之一，也是目前研究的热点。本文介绍了几种多元氮化物薄膜的沉积技术及性能特点，重点分析了性能对工艺的依赖关系。