多光子纳米加工中激光扫描条件对金属微纳结构的影响

摘要

The influences of laser scanning conditions on the silver micro/nanostructures in multipho-ton photoreduction of metallic micro/nanostructures and morphology using femtosecond laser were investigated. The results indicated that increasing the distance between scanning points (d) could make the width of lines become smaller and extending the exposure of time (t) could make the lines broadening. Furthermore, the increasing of scanning times (N) led to the formation of large silver particles and lumps on the structures due to the fusion of silver nanoparticles which on the surface of metallic micro/nanostructures.%研究了飞秒激光多光子还原制备银微纳结构技术中激光扫描条件对金属微纳结构与形貌的影响.结果表明:增加激光扫描点间距d可获得较小线宽,延长曝光时间t使线条变宽,增加扫描次数N可使金属微纳结构表面银纳米粒子熔融凝固成较大尺寸颗粒及块状物.