A method for fabricating composed electrode of solid oxide fuel cell (SOFC) on silicon substrate by atmospheric and suspension plasma spray is presented. Anode and cathode layers were deposited by atmospheric plasma spraying (APS) using dry powder feedstock; Electrolyte layer was deposited by suspension plasma spraying (SPS) using mechanical injection. Suspension penetration within the plasma jet was monitored by a CCD camera and the best injection pressure was 0.25MPa by the characteristics analysis of the CCD pictures. The composed electrode layers were characterized in terms of microstructure and composition by SEM and EDAX. Experimental results showed that spray distance was the most important parameter, which influenced electrolyte microstructure, deposition efficiency and porosity; suspension plasma spray could fabricate thin (25μm), fine grain (2-4μm) and dense (porosity of 2.15 ％) electrolyte layer of SOFC.%提出并研究以硅片为基体、采用固/液相等离子喷涂工艺制备固体氧化物燃料电池复合电极.固相送料方式喷涂阳极和阴极;悬浮液束流送料方式喷涂电解质.用CCD监测悬浮液束流与等离子射流形态,其特征分析结果表明最佳注射气压为0.25MPa.采用SEM和EDAX对电极涂层微观组织和组分进行分析,结果表明:喷涂距离是影响电解质涂层形貌、沉积效率和孔隙率的关键参数;悬浮液束流送料喷涂可以制备薄的(涂层平均厚度约为25μm)、组织精细的(粒度为2～4μm)、致密的(孔隙率约为2.15%)电解质涂层.
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