TiN /ZrN multilayers with different modulation periods were prepared by asymmetrical bipolar pulsed reactive magnetron sputtering. The microstructure, mechanical properties and fracture characteristics of multilayers were investigated by X-ray diffraction, scanning electron microscopy and nonoindentation. The results show that the nanohardness reaches to 43GPa at modulation period 19. 86nm. The fracture morphology of TiN/NbN multilayer was observed by SEM after three-point bending test, which reveals that the cracks in the multilayer have a tendency of deflection at the interfaces and thus a higher cracking resistance of the multilayer can be induced.%采用非对称双极脉冲磁控溅射制备了一系列不同调制周期的TiN /NbN纳米多层膜,利用X射线衍射分析(XRD)、纳米压痕仪、扫描电子显微镜(SEM)表征了薄膜的微观结构、力学性能和断口形貌.结果表明,在调制周期为19.86nm时,纳米压痕硬度达到43GPa.利用三点弯曲法形成裂纹的扩展,并观察到了裂纹的偏转特征.
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