Ti6Al4V表面磁控溅射高硬SiC薄膜的摩擦磨损性能

摘要

采用室温磁控溅射技术在Ti6A14V表面制备出高硬SiC薄膜,对其组织结构、纳米压痕行为和摩擦磨损性能进行了研究.结果表明:实验制备的SiC薄膜呈非晶态,其纳米硬度、弹性模量分别为26.8GPa和229.4GPa;在以氮化硅球(半径为2mm)为对摩件的室温Kokubo人体模拟体液下,其磨损速率在10-5 mm3 m-1 N-1级,载荷低(50g)时摩擦因数约为0.173,载荷高(200g)时摩擦因数约为0.280,此时薄膜自身发生局部破裂.%High-hard SiC film was developed on Ti6Al4V alloy using magnetron sputtering technique at room temperature,and its microstructure,nanoindentation and friction/wear properties were investigated.The results show that the SiC films were amorphous and exhibited the nano-hardness of 26.8GPa and the elastic modulus of 229.4GPa.As sliding against Si3N4 ball (2mm in radius) using ball-on-disc type wear tester under Kokubo SBF at room temperature,the SiC films exhibited the special wear rate in the magnitude order of 10-5 mm3 m-1 N-1 and the friction coefficient of about 0.173 and 0.280 at the load of 50g and 200g.The higher friction coefficient is primarily due to itself breakage of the SiC films.