磁控溅射镀Al对NiCrAlY合金层循环氧化性能的影响

摘要

Al films were fabricated on the surface of NiCrAlY alloy by means of magnetron sputtering technique.Cyclic oxidation Behaviors of coat with Al deposited and coat without Al deposited were investigated at 1200℃.The results indicated that the thickness of Al film was about 2μm, and the inner element ratio was not changed.The Al film was positive to form continuous, compact and protective a-A1_2O_3 layer on the surface of NiCrAlY alloy. The oxidation speed was slowed down by protective layer and the desquamation of oxide was delayed. The performance of oxygenation resistance was improved.%通过磁控溅射手段在NiCrAlY合金表面成功制备了1层Al膜,并比较了镀Al粘结层和不镀Al粘结层在1200℃循环氧化的性能.结果表明,磁控溅射镀Al,制得表面Al膜厚度在2μm左右,NiCrAlY合金层内部的组分并无变化.这层Al膜有助于在表面形成1层分布连续、排列紧密的α-Al_2O_3层,降低了合金层的循环氧化增重速率,延长了涂层开裂脱落时间,使NiCrAlY合金表现出了比较好的抗循环氧化性能.