金属Ag微网格修饰ITO薄膜的制备及光电性能

摘要

In this paper,the technology of polystyrene(PS) microsphere template and DC magnetron sputtering was utilized to conduct surface-modification on In2O3∶Sn(ITO) films with the micro-grid of Ag in order to get periodic surface structure on the ITO films.This paper studied the effects of the diameter of the PS microspheres and the sputtering time on the surface morphology,transmittance in UV-Visible range,diffuse reflectance and conductive properties of the modified ITO films.Both the experiments and analyses showed that the modification of the ITO film with Ag micro-grid under the optimized conditions will improve the conductive properties of the films to the maximum of 19.5%,and its diffuse reflectance properties to 200%,with the decrease of the transmittance in visible region less than 10%,and with 2 μm diameters of polymer microspheres and 30 s sputtering time.This will help improving the light trapping effect of solar cells using ITO films as transparent electrodes.%利用聚苯乙烯（PS）微球模板技术和直流磁控溅射技术在ITO（In2O3∶Sn）薄膜表面进行Ag的微网格修饰,得到具有良好周期性的表面结构。研究了PS微球直径和直流磁控溅射Ag时间对ITO薄膜表面形貌、可见光区透过率、漫反射率和导电性能的影响。实验及分析证明,对ITO表面进行Ag微网格修饰,当微球直径为2μm,溅射时间为30s时,最大可提高薄膜的导电性能19.5%,其漫反射性能可提高200%,同时在可见光区透过率的降低控制在10%以下,这将有助于提高ITO薄膜作为太阳能电池透明电极的陷光性能。