超声喷雾热解制备涂层导体研究进展∗

摘要

Ultrasonic spray pyrolysis (USP)was a newly developing method for preparing coated conductor in recent years.It has the advantages of low cost,non-vacuum and fast deposition.This paper makes an elabora-tion on the basic process of USP technology and a comprehensive review on the recent progress of preparing coa-ted conductor,and holds some expectations to its developing prospect.%超声喷雾热解法(USP)是近些年来新兴的一种制备涂层导体的方法，使用该方法制备涂层导体薄膜具有沉积速度快、廉价以及非真空等优点。对USP 法的基本过程进行了阐述，综合评述了近年来采用该方法制备涂层导体的研究进展，并对其未来发展趋势加以展望。