PDC-SiCN陶瓷基无线无源温度传感器的制备

摘要

为了解决航空发动机的温度检测问题,提出了一种以聚合物先驱体陶瓷SiCN(PDC-SiCN)为传感器介质材料的无线无源温度传感器,并搭建了无线无源温度传感器的测试系统.PDC-SiCN陶瓷基无线无源温度传感器是以聚合物先驱体陶瓷SiCN(PDC-SiCN)作为传感器介质材料,以金属铂作为谐振腔材料.分析了PDC-SiCN陶瓷基无线无源温度传感器的谐振频率与测试温度之间的关系,传感器的测试温度达到了610 ℃.研究发现,PDC-SiCN陶瓷基无线无源温度传感器的谐振频率随测试温度升高呈单调递减变化,通过对传感器的谐振频率与温度的关系进行多项式拟合,610 ℃时传感器的灵敏度为0.4705 MHz/℃.PDC-SiCN陶瓷基无线无源传感器在高温恶劣环境具有广阔的应用前景.%In order to solve the problem of temperature detection of aeroengine, a wireless passive temperature sensor with polymer derived ceramic SiCN (PDC-SiCN) as sensor dielectric materials was proposed, and a test system of wireless passive temperature sensor was set up.PDC-SiCN ceramic-based wireless passive temperature sensor is a polymer derived ceramic SiCN (PDC-SiCN) as a sensor dielectric material and metal platinum as a resonant cavity material.The relationship between the resonant frequency of the PDC-SiCN ceramic-based wireless passive temperature sensor and the test temperature is analyzed.The test temperature of the sensor reaches 610 ℃.It is found that the resonant frequency of PDC-SiCN ceramic-based wireless passive temperature sensor is monotonically decreasing with the increase of test temperature.The sensitivity of the sensor is 0.4707 MHz/℃ by fitting the resonant frequency and temperature of the sensor.PDC-SiCN ceramic-based wireless passive sensor has a broad application prospects in the harsh environment.