针对航空发动机高温恶劣环境监测对耐高温传感器的需求,提出采用新型耐高温聚合物先驱体陶瓷(PDC-SiCN陶瓷)为温敏介质材料,制备被动式有线无源微波温度传感器,实现温度信息的有线无源传输.以PDC-SiCN陶瓷为填充介质,金属银作为表面层,形成谐振器;以共面波导线和共面天线为传输线,实现微波信号的传输;在谐振器的侧面开槽,实现宽频激励信号和谐振信号在传输线和谐振器之间的传输.采用HFSS软件进行结构尺寸的仿真和优化,设计出了满足最大传输效率的被动式有线无源PDC-SiCN耐高温温度传感器结构.通过以上结构设计,制备出了有线无源温度传感器.结果表明,所设计传感器的工作频率为10.16 GHz,依据材料的变化特性该传感器可实现频率在500 MHz变化范围内的测量.%High temperature sensor is intensive needed in the aspect of monitoring the harsh temperature environment of aero-engine.In this paper,the wired passive microwave temperature sensor is prepared based on the novel high temperature resistant polymer derived ceramic-silicon carbonitride (PDC-SiCN).This PDC-SiCN acts as temperature sensitive medium and can realize the wired passive transmission of temperature information.The resonator of the temperature sensor is formed by the filling medium PDC-SiCN and surface layer metal silver.The transmission line is the combination of coplanar waveguide line and coplanar antenna to realize the trans mission of the microwave information.In addition,slotting in the side of the resonator can realize the transmis sion of broadband excitation signal and resonance signal between the transmission line and resonator.The numerical simulation of the transmission characteristic of this sensor is conducted by using HFSS software.Final ly,the PDC-SiCN wired passive high temperature sensor which satisfies the maximum transmission efficiency is designed and prepared according to the simulated and optimized structure sizes.Results indicate that the operat ing frequency of the designed sensor is 10.16 GHz,and it can realize the measurement in the variable range of 500 MHz according to the dielectric temperature characteristic of the PDC-SiCN materials.
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