School of Microelectronics and Solid-State Electronics, Univ. of Electron. Science and Technology of ChinaUESTC, Chengdu, 610054, China;
School of Microelectronics and Solid-State Electronics, Univ. of Electron. Science and Technology of ChinaUESTC, Chengdu, 610054, China;
School of Microelectronics and Solid-State Electronics, Univ. of Electron. Science and Technology of ChinaUESTC, Chengdu, 610054, China;
BiCMOS, molecular beam epitaxial,non-selective graphic epitaxial, SiGe.;