引信用MEMS气流谐振压电发电机

摘要

Due to its complicated structure, great bulk, the currently air driven fluidic resonance generator for fuze has much limitation in practical use. In this paper,a novel micro air driven fluidic resonance generator based on PZT jet generator principles and MEMS process technology was proposed. The FSI and piezoelectric simulation results showed that the new MEMS piezoelectric generator could meet the low cost requirement of fuze,further more it was of simple structure,small size,and high energy density.%针对目前引信用气流谐振发电机结构复杂、体积大等缺点,结合压电式射流发电机原理和MEMS技术工艺,提出了一种MEMS气流谐振压电式发电机.通过流场和流固耦合分析及压电仿真等对发电机的性能进行的验证表明:MEMS压电式射流发电机可满足低功耗引信使用,且具有结构简单、体积小、能量密度高等特点.