薄膜材料透射电镜截面样品的简单制备方法

摘要

Preparing cross⁃sectional transmission electron microscope ( TEM) specimens for thin⁃film materials is very complex and its success rate is very low. A preparation method with a simple operation and a high practicality was introduced. By using this method it could succeed in preparing cross⁃sectional TEM specimens for thin⁃film materials grown on brittle substrate.%针对薄膜材料透射电镜截面样品制备过程复杂、制样成功率低的问题，本文详细介绍了一种操作简单、实用性强的制备方法，采用该方法可以成功制备出脆性衬底上薄膜材料的TEM截面样品。