Vibration test of micro machined gyroscope based on high speed photography and SURF

摘要

Based on three kinds of dynamic test of MEMS,a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced.Firstly,the architecture of the system hardware is introduced.Secondly,the image tracking performance is compared by the test using the template matching algorithm,the mean shift algorithm and the SURF algorithm.The vibration curve shows that high speed photograph combined with SURF algorithm is faster,more accurate,and more suitable for the vibration test of micro machined gyroscope.After the frequency analysis and related interpolation,more characteristics of micro gyroscope can be obtained.