基于薄膜热电偶的高速切削动态温度监测系统设计

摘要

提出了一种基于薄膜热电偶传感器的高速切削动态温度监测新方法.采用磁控溅射、光刻技术、PECVD等方法在立方氮化硼(PCBN)高速切削车刀前刀面上沉积多层薄膜,制备NiCr/NiSi薄膜热电偶传感器.详细阐述了薄膜温度传感器的制备过程,设计了高速切削温度和切削力的数据采集与监测系统.以高速数据采集卡PCI-9118为硬件,结合Tchart控件,采用VC ++编制简洁友好的人机界面来实现对高速切削温度和切削力数据的实时采集、显示与分析.试验表明,设计的数据采集和监测系统使用方便、灵活、可靠.%A new dynamical temperature monitoring system for high-speed cutting based on thin-film thermocouples was developed.NiCr/NiSi thin-film thermocouples were deposited on the rake faces of Polycrystalline Cubic Boron Nitride ( PCBN) highspeed cutting tools by magnetron sputtering,light etching and PECVD methods.The preparing process of the thin-film temperature sensosr was elaborated.The data acquiaiton and monitoring system for the cutting temperature and cutting force was designed.The data were acquired by a high-speed sampling card PCI-9118 and analyzed through a simple , friendly human-machine interface.The sofware was programmed by VC ++ language combined with Tchart control buttons.The experiments show that the data acquisiton and monitoring system is easy to use,flexible and reliable.