双阵列式电容传感器的特性研究和参数优化

摘要

利用传感器相邻极板之间灵敏场不均匀的特点,建立了一种新型双阵列式电容传感器,并且引入1个新的目标函数来评价灵敏场在某个区域幅值的大小.通过有限元仿真的方式,分析了电极覆盖率、管壁介电常数、管壁厚度对灵敏场分布和目标函数的影响,并进行了优化设计,获得优化结构参数,为灵敏场分布的改善和传感器系统性能的提高提供了必要的理论基础.%In this paper,a new double array of capacitive sensor is designed and a new objective function is introduced to evaluate the amplitude of sensitive filed in a region. It' s based on non-uniform characteristics of sensitivity of the connected plate. The influence of the electrode coverage, the pipeline permittivity and pipeline thickness on sensitivity distribution and objective function are analyzed by the method of finite element simulation. Through the simulation analysis and optimum design,optimum parameters are obtained. Furthermore, it can provide the theoretical basis for development of sensitivity distribution and the performance of transducer.