一种新型微结构气体传感器电极设计分析

摘要

利用铂作为电极材料,SiO2作为隔热层,在单晶硅衬底上,设计了一种新型微结构气体传感器的电极结构.这种共平面型电极结构消除了加热器产生的磁场对测量信号的干扰.通过有限元分析工具分析加热器和信号电极在不同宽度与间距下的温度分布.当加热器宽度为100 μm,信号电极宽度35 μm,间距为70 μm,传感器获得均匀的温度分布和低功耗,有利于传感器整体性能的提高.%Use metal platinum filament as gold electrodes,SiO2 as thermal and electricity insulation layer. In the silicon substrate, a kind of the micro-structural gas sensor electrodes are designed. The coplanar electrode structure eliminate effectively magnetic field from the heater on the measuring signal interference. Then simulated and analyzed the temperature distribution from different widths heating,testing signal electrodes and electrode gap. Finally,find that when the heater is 100 μm,the signal electrode 35μm, and the gap 70 μm, get low power consumption, uniform temperature distributing and transient response, which is conducive to the enhancement of the overall performance of the sensor.