基于DVD光学头的二维微小角度测量研究

摘要

为了实现精密平台二维角度的在线检测，提出了一种基于DVD光学头的二维微小角度测量的方法。利用DVD光学头进行角度测量，是基于激光自准直原理，以四象限光电探测器作为检测元件，以固定在被测物上的反射镜作为被测元件进行测量的一种角度测量方法。搭建了基于英国RPI精密转台的实验系统，对测量方法进行了实验测试。结果表明：基于DVD光学读取头设计的二维角度测量装置测量范围为±110″，平均分辨率达到0．2″。该测量方法稳定、可行，且测量装置具有结构紧凑、成本低等特点。%In order to measure the two-dimensional angle of a precision stage, a method for measuring the micro-angle by u-sing the DVD pick-up head was used.The measurement method was based on auto-collimation theory, which used the PSD in the DVD pick-up as detector and used the mirror as object.In order to verify the measurement method, the experiment system based on the RPI precision rotary table was set up.The experimental results show that the method is simple and reliable and the detection range is ±110″and the resolution is 0.2″.The measuring device has the advantages of compact structure and low cost.