平面柔性涡流传感器能同时独立测量电导率和提离,在应力评估、缺陷检测方面具有较大优势。文中采用有限元法仿真分析了工作频率对平面柔性涡流传感器性能的影响,在工作频率为500 kHz时,使用所设计的平面柔性涡流传感器对铝合金3A21进行了拉伸应力试验,得到铝合金电导率与拉伸应力的关系。实验结果表明,在合适的工作频率激励下,平面柔性涡流传感器能有效实现导电材料的电导率测量和应力大小的评估。%The planar flexible eddy current sensor can test lift-off and conductivity independently at the same time,making it easy for defect testing and stress evaluation.The effects of the frequency on the performances of planar flexible eddy current sensor were analyzed by using the finite element method ( FEM) .The sensor working in frequency of 500 kHz was used for tensile stress testing of aluminum alloy 3A21,then the relationship between the aluminum alloy conductivity and the tensile stress was obtained. The experimental results show that the planar flexible eddy current sensor can be used for measurement of conductive material's conductivity and evaluation of its stress when the exciting frequency is appropriate.
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