应用于高光谱成像的 CMOS 图像传感器

摘要

文中介绍了应用于高光谱地球观测的 CMOS 有源图像传感器。该器件由全局曝光模式的像素组成512×256面阵，可实现450帧/ s 的帧频。全局曝光模式是由在光二极管外增加1个储存电容的方式实现的。该器件采用0.5μm 标准CMOS 工艺，满阱电子达到140000电子，瞬态噪声29电子，动态范围74 dB。采用该器件开发的高光谱成像仪的空间及频谱分辨率具有很高水平。%A 450 frame per second (fps) CMOS Active Pixel Sensors (APS) with 512×256 global shutter pixels was proposed for hyperspectral earth observation application.The global shutter was realized by adding a storage capacitance next to the photodi-ode.The sensor was manufactured in 0.50 μm standard CMOS process,resulting in a full well capacity of 140 000e-,a read noise of 29e- RMS and a dynamic range of 74 dB.The developed spectrometer by this sensor is able to achieve the better spatial and spectral resolution.