激光显微拉曼光谱仪的设计与性能参数测定

摘要

激光显微拉曼光谱仪是一种具有较高的空间分辨率，适用于固体定性分析和液体定量分析的微区无损检测系统，综合了光学、机械、电子和计算机等技术。可以快速鉴别各种材料，并且具有成像分辨率高、分析速度快、使用简单等特点。针对这些特点，完成了激光显微拉曼光谱仪的设计和参数测量。首先阐述了激光显微拉曼光谱仪的分析基础，然后介绍了激光显微拉曼光谱仪设计，最后详细说明了对光谱仪的性能参数测定。调试完成的激光显微拉曼光谱仪的重复性和线性度参数均已达到预期的设计，满足固体微区检测和液体定量检测的需要。%Laser micro-Raman spectrometer is a micro-area nondestructive testing system with high spatial resolution ,suitable for solid qualitative analysis and liquid quantitative analysis ,and it is a combination of optical ,electronic ,mechanical and computer technology .Micro-Raman spectroscopy can quickly identify a variety of materials ,and it has the features of high resolution imaging , fast analysis,simple use and so on.For these features,the design and performance parameters measurement of laser Raman spec-trometer were completed.First,the analytical basis of laser Raman spectroscopy was introduced .Second,the design of laser Raman spectrometer was presented .Finally,the performance parameters measurements of laser micro-Raman spectrometer were described . Repeatability and linearity parameters of laser micro-Raman spectrometer reached the expectation through debugging ,thus satisfying the needs of solid micro-detection and liquid quantitative detection .