球体圆度测量中光轴偏移对测量精度影响的实验研究

摘要

为描述光学精密位移传感器测量高端轴承球体圆度过程中，光轴与轴承球体赤道面存在一定的角度时对测量结果的影响，讨论了这种装置的工作原理及可实现的测量精度，从理论上分析了有一定倾斜时测量值与实际值之间的误差，同时通过实验测量，验证了该装置在测量轴承球体时测量误差与倾斜角之间的关系。评估了利用该装置测量高端轴承球体几何量，如圆度等时的精度上限，建立了一套利用精密光学位移传感器测量轴承球体几何量及误差评定的方法。该装置及测量方法可用于生产线上的在线检测。%In order to describe the effect on measurement accuracy of a high precision bearing ball when there is a tilt angle between the optical axis and the equatorial plane of the ball for a setup that utilizes a precision optical displacement sensor , the working principle and the measurement accuracy of the setup were briefly discussed .Moreover , the error due to such tilt angle was analyzed theoretically .Experimental data verified the relationship between the error and the tilt angle .The up limit of measurement accuracy for geometric quantities , such as roundness, was evaluated.A method of measuring geometric quantities and their error evalu-ation for bearing balls was established.The setup and the measurement method can find its online application for production lines.