基于纳米化聚酰亚胺材料的MEMS湿度传感器的研究

摘要

Aiming at the problem that the existing MEMS humidity sensor has complex fabrication technique and low sensitivi -ty,a MEMS humidity sensor based nano-modified polyimide which is fabricated by a plasma-striping technique was reported in this paper .The wet material was surface decorated using plasma technology ,which is compatible with CMOS .Two kinds of devices made of the material of amination polyimide and nano-modified polyimide were capacitance response characteristic were tested in different humidity conditions .In a relative humidity range of 50%~80%,the sensitivity of the nano-modified-PI-based devices is 50%larger than that of imidization-PI-based sensors .%针对现有的MEMS湿度传感器制备工艺复杂、灵敏度较低等问题，文中报道了一种基于纳米化聚酰亚胺材料的MEMS湿度传感器，该器件的感湿材料是利用等离子技术对聚酰亚胺进行表面修饰制备的，该方法简单且与CMOS工艺兼容。同时文中对同样结构基于亚胺化聚酰亚胺材料和纳米化聚酰亚胺材料的两种器件在不同湿度条件下的电容响应特性进行了测试，测试结果表明，在相对湿度50％～80％范围内，基于纳米化聚酰亚胺材料的器件灵敏度高于同样结构基于亚胺化聚酰亚胺材料器件约50％。