基于压阻效应的陶瓷压力传感器

摘要

设计制作了一种基于压阻效应的陶瓷压力传感器,采用宜弯折柔性调理电路,体积小、稳定性好、宜封装集成.在不同温度、压强环境条件下,对传感器进行了系列实验测试,其满量程综合检测精度(线性、迟滞、重复性等)达到0.975%,完全符合压力传感器通用技术条件规定的综合误差要求,性能指标优良.加之陶瓷芯片具有耐腐蚀、抗磨损、成本低廉等优点,该传感器可被广泛应用在各种压力检测的场合.%With a flexible processing circuit,a ceramic pressure sensor based on piezoresistive effect was designed and fabri-cated,which has advantages of small size,good stability and suitable packaging.Then,the sensor was tested under different tem-perature and pressure conditions,and a comprehensive detection accuracy(linearity,hysteresis,repeatability,etc.) of 0.975% was obtained,which is fully in accordance with the global error requirement of the general technical specifications for pressure sensor, that illustrates the excellent performance of the sensor.Combined with the advantages of corrosion resistance,wear resistance and low cost,the ceramic sensor can be widely used in various pressure detection.