新型低温漂电容式角度传感器的研究

摘要

针对常用的电容式角度传感器温漂较大问题,设计了一种新型低温漂电容式角度传感器及测量电路.传感器主要包括前极板、转轴、陶瓷介质和后极板,其中前、后极板采用碳氢化合物材料制作,前极板通过陶瓷介质和后极板构成差动式平板电容器.电容传感器的后极板设置激磁电路产生传感器用高频激磁信号,前极板设置电容差分调幅电路将与输入角度对应的容值转换成电压值输出.文中设计的新型电容式角度传感器,可通过提高激磁信号频率来提升传感器的灵敏度,且利用外部自动增益控制电路,保证了传感器在温度变化时其灵敏度基本不变.%Temperature drift is a problem for the common capacitive angle sensor,a new type of low temperature drift capaci-tive angle sensor and measuring circuit was designed in this paper.The angle sensor mainly included front plate,shaft,ceramic medium and back plate, front plate and back plate were made of hydrocarbon materials, and forming a differential capacitor through the ceramic medium.The excitation circuit was fixed on the back plate of capacitance sensor,in order to generate high fre-quency excitation signal,the differential amplitude modulation circuit was fixed on the front plate,in order to converte the input angle into the output voltage.The novel capacitive angle sensor was designed in this paper,its sensitivity can be increased by im-proving the excitation signal frequency,and the sensor sensitivity can be ensured same basically when the temperature changing through the external automatic gain control circuit.