基于谐振腔理论的加速度传感器设计

摘要

为了实现新型的可集成微纳加速度传感器,文中采用微纳光纤设计了环形谐振腔的加速度传感器.通过电场的传数矩阵推导了谐振腔中的速度变化与光强变化间的关系,得到了加速度作用下微环谐振腔的谐振波长、周长、有效折射率的变化值间的函数关系.结果表明:设计的微环波导电场波动明显,耦合效率较好;光谱强度和3 dB带宽变化较小,Q值达到105;在质量块每增加10 g时,输出光谱图约向右漂移3 nm;加速度与谐振波长漂移量基本成线性关系,可以通过谐振波长的漂移量来实现对加速度的测量.%In order to achieve the integration of new micro acceleration sensor,this paper adopts the micro-nano optical fiber to design ring resonator acceleration sensor.By the electric field on the number of transfer matrix,the relationship between speed and light intensity changes was deduced.The function relationship between resonance wavelength,perimeter,effective refractive index values under the action of the micro ring resonator cavity was gotten.Results show that the designed micro ring waveguide electric field fluctuates significantly and coupling efficiency is better.Spectral intensity and 3 dB bandwidth change small,and Q value reached 105.When the mass increases 10 grams,output spectrum drifts to the right about 3 nm.Acceleration and resonant wavelength drift quantity has liner relationship,acceleration measurement was realized through resonant wavelength drift measurement.