等差方孔耦合型太赫兹波导定向耦合器设计

摘要

The terahertz waveguide directional coupler with square multiple coupling holes was designed with a wide frequen -cy band,high directivity and stable coupling value.13 group holes were used to achieve a wide operating band and the coupling holes were decreased and arranged at equal intervals to meet the high directivity and better coupling flatness based on multi -hole coupling principle.The coupler structure was simulated and optimized with HFSS.The results show that in 0.3~0.5 THz spectrum the return loss of each port is less than -26 dB.The coupling degree of the coupler is(7.8±0.6)dB which means it belongs to strong coupling and has smooth coupling flatness.The isolation is more than 30 dB,namely,the directivity is higher than 20 dB and it has good directivity.The average insertion loss is 0.7 dB.The relative bandwidth reaches to 45%.The coupling process based on MEMS technology was described and this method can be used for processing.%设计了一种宽频带、高方向性、耦合平稳的方孔耦合型太赫兹波导定向耦合器.基于多孔耦合原理,用13组小孔来实现宽频带,耦合孔正方形等差减小等间距排列来实现高方向性和较好耦合平坦性.通过HFSS软件对该耦合器进行模型仿真及优化,结果表明,在0.3~0.5 THz频段内,各端口回波损耗均小于-26 dB,耦合度为(7.8±0.6)dB,属于强耦合且耦合度平坦性良好,隔离度达到30 dB以上,即方向性较好且优于20 dB,平均插入损耗为0.7 dB,相对带宽达到45%.对基于MEMS技术的该耦合器的工艺制作流程进行了阐述,可利用该方法进行加工.