大面积FTO透明导电薄膜制备技术研究进展

摘要

掺氟氧化锡透明导电(FTO)薄膜由于性价比优势,已成为薄膜太阳电池的重要原材料,但其导电性能不佳导致商用大面积薄膜太阳电池光电转换效率只有实验室小面积薄膜太阳电池效率的40％ ～60％,提高大面积FTO薄膜的导电性能和降低生产成本成为其广泛应用的关键.介绍了化学气相沉积法、喷雾热分解法、磁控溅射法和溶胶-凝胶法制备nO薄膜的工艺和技术进展.对改进大面积FrO薄膜导电性能的新途径和国内外研究进展做了综述.建议重点研究锑磷掺杂FTO薄膜制备技术和重点研究纳米银复合FTO薄膜制备技术,以克服FTO薄膜电阻较大的缺陷,同时保持导电薄膜良好透光性能.%F-doped tin oxide transparent conductive films (FTO films) have become the important raw materials of thin-film solar cells because of its competitive performance-price ratio.However,the efficiency of energy conversion for commercial large area film solar cells was only 40％～60％ value of laboratory small area film solar cells due to poor conductivity of FTO films.Therefore,increasing conductivity and decreasing production cost of FTO transparent conductive films are keys to widely application.The preparation technique and research progress of FTO transparent conductive films with chemical vapor deposition method,spray pyrolysis deposition method,magnetron sputtering method,and sol-gel method was introduced.New routes and progresses at home and abroad to improve conductivity of FTO films were summarized.It was also suggested to mainly study preparation techniques of Sb-P-doped and nano-Ag complex FTO films to solve conductivity problem of FTO films and maintain the good light transmittance.