原子层沉积技术在钛改性多孔氧化铝上的应用

摘要

采用原子层沉积技术进行Al2O3表面钛改性,利用N2吸附-脱附、X射线衍射、X射线荧光分析、透射电镜和热重-微分热重-差示扫描量热等表征手段对改性前后的A12O3载体进行表征.结果表明,钛分散到Al2O3表面,Al2O3载体表面氧化钛为锐钛矿结构,改性后的载体具有良好的热稳定性.钛分散性与Al2O3表面化学环境有关,钛对多孔A12O3表面改性可以通过原子层沉积技术实现.%Atomic layer deposition technology was used to modify alumina surface with titanium. Alumina before and after modification was characterized by isothermal N2 adsorption-desorption, X-ray diffraction (XRD), X-ray fluorescence analysis (XRF), transmission electronic microscope (TEM) and thermo-gravimelry-differential thermogravimetry-differential scanning calorimetry (TG-DTG-DSC ). The results showed that Ti was dispersed on the surface of alumina as titania with anatase structure. Modified alumina exhibited excellent thermal stability. Dispersily of Ti is related to chemical environment of alumina surface. Ti modification of porous alumina is feasible using atomic layer deposition technology.