Nanometer spherical silica powder was one of the means to improve technology of silicon powder application performance and practical value. Because of its excellent performance, it had broad prospects for development. Therefore, the nanometer spherical silica powder became the research focus of powder material. Through the preparation of nanometer spherical silica powder, including high temperature melting method, plasma method, chemical precipitation method, sol-gel method, microemulsion method and gas phase method and so on, its preparing process were described in detail, and the trend of its development was briefly analyzed.%硅微粉的纳米球形化是提高硅微粉应用性能和实用价值的技术手段之一,并且由于其优异的使用性能而具有广阔的发展前景。因此,硅微粉的纳米球形化已成为粉体材料研究的热点。本文通过介绍纳米球形硅微粉的制备方法,主要包括高温熔融法、等离子体法、化学沉淀法、溶胶-凝胶法、微乳液法和气相法等,并对其制备工艺进行了比较详细的描述,同时对其发展趋势作了简要的分析。
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