硅晶片电阻率测量技术的研究

摘要

分析了硅晶片电阻率测试的重要性并介绍了国内外常用的电阻率测试方法,并对使用最广泛的工艺检测手段- 四探针技术的原理、测准条件及发展状况进行了详细的介绍.%This paper analyzes the importance of silicon wafer resistivity measurement and introduces the commonly used resistivity measuring methods at home and abroad. And the most widely used process measuring method-four-point-probe technology is studied in detail including its principle, accurate measurement conditions and development status.