温度对半导体封装设备光学系统的影响

摘要

In this thesis,the effect of tem perature variation with sem iconductor equipm ent for optical system was analyzed. M eanwhile,interrelated exam ple of optical system in sem iconductor equipm ent was expatiated.A nd then,the induced dam age for m anufacture with itwas layout.%分析了半导体设备温度变化对其光学系统的影响，以某半导体设备光学系统为例阐述并指出了此影响对生产造成的危害。