GaN-MOCVD设备MO源注入摩尔流量的精确控制

摘要

分析了GaN-M OCVD 设备中M O 源注入摩尔流量控制的基本原理,给出了决定M O 源注入摩尔流量的三个重要条件,然后针对于GaN-M OCVD 中5 种常用的金属有机源,根据工艺生长的需要,分别给出了MO 源注入摩尔流量精确控制的解决方案.%T he article analyses basic principle of control of M O source injected m ol flow of G aN-M O C V D ,and gives three im portantcondition ofdecided M O Source Injected M olFlow .Then to five fam iliar m etal organic source of G aN-M O C V D , based of dem and of technology grow th, respectively gives solution of accurate control of M O source injected m ol flow .