The development and application of silicon Neutron Transmutation Doping (NTD) technology in China

摘要

The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this paper.The advantages of NTD,compared with conventional technology of doping,are narrated.The principle of NTD as well as the implementation of the main procedures related to Si NTD is explained.The market demand tendency is prospected,and the advanced measures on NTD quality control are described.