A Predictive Instrument for Sensitive and Expedited Measurement of Ultra-Barrier Permeation

摘要

The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor.No reliable results have been reported in the range of 10–6 g∙(m^(2)∙d)1,and there is no standard ultra-barrier for calibration.To detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test period,a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation,detection,and evacuation of the permeant.Detection reliability was ensured by means of calibration using a standard polymer sample.After calibration,the lower detection limit for water vapor permeation is in the range of 10–7 g∙(m^(2)∙d)1,which satisfies the ultra-barrier requirement.Predictive permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results,thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.