铝合金钎焊片紫外激光切割技术的应用研究

摘要

Waveguide antenna is widely used in modern radar as an important microwave component, which is composed of multiple high precision thin walled cavities. On the other hand, the dimensional accuracy, form and position precision of antenna are becoming more and more tend to micron grade standard. As the key link of braze welding process, the unique wavelength and processing characteristics of ultraviolet (UV) laser, bring tremendous progress for wafer cutting process. UV Laser was employed to machine aluminum foil, which is favorable for high dimensional precision, low deformation but without hang slag and carbon sediments. Machining precision and dimension were also investigated after the laser cutting process.%波导天线是广泛应用于现代雷达领域的一种微波组件，一般由多个形状复杂的高精度薄壁型腔类零件组成，其结构复杂，往往存在数百个波导型腔及微型通槽，有几百个尺寸需要保证；另一方面，天线的尺寸精度和形位精度也越来越趋向于微米级标准。作为微波组件钎焊过程的关键环节，如何加工出与微波组件焊接面形状一致和精度匹配的钎焊片已成为微波组件制造领域的关注热点，也是制约微波组件精密焊接的一项瓶颈技术。研究针对现有技术中钎焊片切割尺寸精度低、变形严重、钎焊片上存在挂渣和碳积物等问题，尝试使用紫外激光对钎焊片进行切割，并对切割后的钎焊片精度进行了统计分析。