半导体设备预测性维修技术

摘要

Predictive maintenance is the focus of research in the maintenance field over the years,the paper is starting from the general point for predictive maintenance,analysis and comparison the strengths and weaknesses of the corrective maintenance,preventive maintenance and predictive maintenance,and lists some semiconductor equipment predictive maintenance measures.Semiconductor equipment production is pipeline operations,any equipment malfunction or failure will bring to the enterprise discontinued,resulting in huge losses.Therefore,we will monitor the key equipment,predict maintenance,elimate the hidden fault,and to avoid major consequences of the disaster.Predictive maintenance is a state-based maintenance,The machine is running,its main site on a regular basis（or continuous） state monitoring and fault diagnosis,determine the status of the equipment which,to predict the future development trend of the equipment status,according to the status of the development trend of the equipment and possible failurmodes,pre-established predictive maintenance programs,to determine the machine to start the repair time,contents,methods,and the necessary technical and material support.Predictive maintenance set equipment condition monitoring,fault diagnosis,failure（status） predicted that maintenance decision.%预测性维修是多年来维修领域研究的重点问题,文章从一般预测维修的论点出发,分析比较了修复性维修、预防维修和预测性维修的优缺点,并列举了一些半导体设备预测性维修的措施。半导体设备生产都是流水线作业,生产中任何一台设备发生故障或者失败都会给企业带来停产,造成巨大损失。所以要对重点设备、关键设备进行监控,进行预知性维修,消除隐藏故障,避免发生重大灾难后果。预测性维修是以状态为依据的维修,在机器运行时,对它的主要部位进行定期（或连续）的状态监测和故障诊断,判定装备所处的状态,预测装备状态未来的发展趋势,依据装备的状态发展趋势和可能的故障模式,预先制定预测性维修计划,确定机器启动修理的时间、内容、方式和必需的技术及物资支持。预测性维修集设备状态监测、故障诊断、故障（状态）预测、维修决策支持和维修活动于一体,是一种新兴的维修方式。