共面波导延迟线薄膜电路研制

摘要

The coplanar waveguide true-time delay line, which is fabricated by thin film hybrid circuit’ s process, has several advantages such as small volume, light weight, low insert loss, and high anti-interference. It also can integrate with other microwave circuits conveniently, and the precision of true-time delay is exactly. Certainly, the fabrication of thin film hybrid circuit with high precision pattern and denseness vias process is more difficult. Through optimize the fabrication process, an X-band 2 bits true-time delay line thin film circuits has been fabricated. The microstrip precision is better than ±5μm. As show by the test results, the insert loss of 2 bits true-time delay line is-5.7dB~-4.6dB, the in-band loss variation is less than ±0.3dB, and the phase bias at operating frequencies is ±5 degree.%基于薄膜电路工艺制作的共面波导延迟线不仅具有体积小、重量轻、损耗低、抗干扰性强等优点，还易与其他微波电路集成，延时精度较准。但它对高精度、密集孔薄膜电路的制作提出了更高的要求。通过优化薄膜电路制作工艺流程，研制出图形精度优于±5μm，具有良好金属化通孔的X波段两位延迟线薄膜电路。测试结果显示，该X波段两位延迟线的插入损耗为-5.7 dB ~-4.6 dB，带内起伏优于±0.3 dB，中心频率点相位偏差为±5°，满足设计要求。