TiO2/ZrO2掺杂MAS系LTCC生带的烧结致密化研究*

摘要

The TiO2/ZrO2 doped MAS(MgO-Al2O3-SiO2)series microcrystal glass powder was fabricated, and then casted to be green tape. The effects of doping, particle size and series temperature on the drying shrinkage and densification were investigated. The results show that the doping of TiO2/ZrO2 reduces the crystallization temperature observably and increase the compaction of tape. Also the reducing of the particle size will promote the compaction and the constriction ratio. The optimization sinter process was confirmed by compare of the densification from different sinter curves.%　　文章以掺杂TiO2/ZrO2的MAS（MgO-Al2O3-SiO2）系微晶玻璃作为功能相，采用流延法制成生带并最终烧结成型。系统地研究了掺杂、粉体粒径、烧结条件等对LTCC基板收缩性能和致密性的影响。结果表明：通过成核剂TiO2/ZrO2的掺杂，能有效降低基板烧结温度，提高烧结致密性；粉体粒径对生带烧结后的致密性影响较大，粒径越小生带致密化程度越高，同时收缩率也越大。同时通过对比不同烧结条件下样品的致密性，确定了MAS系LTCC生带的最佳烧结曲线。