基于GaAs MMIC工艺的单片均衡器设计

摘要

Amplitude equalizer is widely used in many microwave modules, and it is one of the key proportions. A monolithic equalizer is proposed, which is fully analyzed, and then realized in GaAs MMIC standard technology. The working frequency is between 22 to 32 GHz. The size is 0.8 mm×0.7 mm×0.1 mm. Minus 5 dB slope, not bad SWR, and 2.53 insert loss @32 GHz is get, which meets the design targets.%幅度均衡器被广泛应用于各类微波组件，是其重要的组成部分。对定阻型的幅度均衡器设计进行分析，利用GaAs MMIC标准工艺制作了一款22~32 GHz单片幅度均衡器，该芯片尺寸为0.8 mm×0.7 mm×0.1 mm。经装架测试，在工作频段实现5 dB的负斜率幅度均衡量，驻波良好，插损2.53 dB@32 GHz，基本实现了设计目标。