真空蒸发、淀积、溅射、氧化与金属化工艺

摘要

0605851 PAMOCVD法制备BON和多层TiN/BON薄膜的结构与特性=Structures and properties of BON and multi- layered TiN/BON thin films prepared by PAMOCVD method[刊,英]/D．-C．Lim,G．C．Chen//Electronics Letters．-2003,163(30)．-318-322(E)